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The semiconductor industry is one of the most dynamic, sophisticated, and competitive markets worldwide. As it continues to grow, so too does the demand for ultra-pure gases and chemicals. Fab operators need a reliable and responsive partner with a global reach and technical capability to safely ensure the highest quality, manage costs, reduce environmental impact, and innovate for the future. 

Interactive demo - Click to see what Linde offers for semiconductor fabs

 

Global leader for on-site plant design, fabrication, and operation

Linde pioneered commercial gas purification and liquefaction plants and has been the global leader ever since. Our SPECTRA-NTM series nitrogen generators are designed to scale with customer requirements and have the highest level of opportunity efficiency. We offer both SMR and electrolysis plants for the on-site production of hydrogen and both meet our customers' purity and volume requirements. Linde's Generation-F®   fluorine technology delivers cost-effective chamber solutions, which speed production and reduce environmental impact by replacing global warming gases. 

Reliable supplier of ultra-high purity bulk gases

Linde's network of bulk gas production plants ensures reliable supply of ultra-high purity in any required volume of nitrogen (N2), oxygen (O2), argon (Ar), hydrogen (H2), helium (He), and carbon dioxide (CO2). Our offer continues at the customer with bulk gas storage, purification, and dispense solutions. Linde manages the world's largest and most diverse collection of helium production, with sources located on five continents and aggressive investment in new sources for long-term supply security. Linde is the leader in making high-purity bulk CO2 available for lithography and cleaning applications.

Your partner for special gas technology and supply chain security

We are the technology partner of choice for semiconductor manufacturers. Our innovative technologies and solutions are backed by a global supply chain to bring you smarter, lower-cost, and more sustainable semiconductor manufacturing. Our commitment to safety and quality ensures your integrity.

Linde is the recognized leader for the manufacture of DUV excimer gas mixtures. Our SPECTRATM lithography gases have enabled semiconductor patterning for over 20 years. We combine a prime position in rare gases and halogens with proprietary expertise in blending, analysis, and cylinder treatment to ensure our customers' lithography equipment achieves the highest level of stability and up-time.

Our production and purification technology extends beyond the molecular level to achieve isotopically pure special gases for a number of leading-edge applications. 11BF3 and other 11B compounds allow for devices designed to avoid the disabling effects from thermal neutron capture. Similarly, deuterium (D2) and deuterium-substituted gases are used to make devices robust to hot electron damage. As Moore's Law drives device dimensions below 10nm, Linde's isotopically-enriched solutions will help create successful designs at the smallest achievable scales.

We are where you are. Linde's global network of electronic special gas plants means we are local to both our customers and to other prime material suppliers. We offer you the expertise of our own production along with the ability to further source globally and comprehensively. Linde supplies in all package sizes to create the optimal logistics and supply solution.

Our commitment to quality and safety underwrites all that we do in Linde Electronics. We know our customers have the tightest material requirements and quality in production, supply, and dispense is essential in your success. Safety is our number one concern. We strive to protect the health and security of our employees, contractors, customers, and community and are stewards of our environment for those who come after us. 

Ultra-pure wet chemicals

AUECC , a Linde Group company, specializes in the manufacture and distribution of ultra-pure wet chemicals for the global microelectronics industry.

Serving you further on your site

Linde offers a wide range of professional services to allow you to focus on your core business and keep operations up and running. These extend from on-site services such as turnkey design and installation services and end-to-end management of your gas and chemical supply to systems and equipment for gas and chemical distribution and dispense.



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